The sensor is based on the microthermal measurement principle and makes use of sensirion’s proven cmosens® mems technology. This document describes the main aspects of the i2c communication with sensirion’s liquid flow sensors and provides instructions on how to implement the protocol on a controller system (master) for the communication with a sensor as the i2c device (slave). Thanks to cmosens® sensor technology, sensirion’s flow meters and controllers achieve unmatched ratings for speed, accuracy and repeatability at very attractive system cost The mass flow sensor can be used for both medical and industrial gas mixing, fuel cells and for other oem applications. In addition to a thermal mass flow sensor element, the chip contains an amplifier, a/d converter, eeprom memory, digital signal processing circuitry, and interface The highly sensitive chip is particularly sensitive at lowest flows, giving the sfm4100 sensor its large dynamic range.
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